JPS5525761B2 - - Google Patents

Info

Publication number
JPS5525761B2
JPS5525761B2 JP8413275A JP8413275A JPS5525761B2 JP S5525761 B2 JPS5525761 B2 JP S5525761B2 JP 8413275 A JP8413275 A JP 8413275A JP 8413275 A JP8413275 A JP 8413275A JP S5525761 B2 JPS5525761 B2 JP S5525761B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8413275A
Other languages
Japanese (ja)
Other versions
JPS527762A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8413275A priority Critical patent/JPS527762A/ja
Publication of JPS527762A publication Critical patent/JPS527762A/ja
Publication of JPS5525761B2 publication Critical patent/JPS5525761B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP8413275A 1975-07-09 1975-07-09 Surface film quantity measurement method Granted JPS527762A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8413275A JPS527762A (en) 1975-07-09 1975-07-09 Surface film quantity measurement method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8413275A JPS527762A (en) 1975-07-09 1975-07-09 Surface film quantity measurement method

Publications (2)

Publication Number Publication Date
JPS527762A JPS527762A (en) 1977-01-21
JPS5525761B2 true JPS5525761B2 (enExample) 1980-07-08

Family

ID=13821966

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8413275A Granted JPS527762A (en) 1975-07-09 1975-07-09 Surface film quantity measurement method

Country Status (1)

Country Link
JP (1) JPS527762A (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3426201A (en) * 1965-10-12 1969-02-04 Texas Instruments Inc Method and apparatus for measuring the thickness of films by means of elliptical polarization of reflected infrared radiation

Also Published As

Publication number Publication date
JPS527762A (en) 1977-01-21

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