JPS5525494B2 - - Google Patents
Info
- Publication number
- JPS5525494B2 JPS5525494B2 JP11550676A JP11550676A JPS5525494B2 JP S5525494 B2 JPS5525494 B2 JP S5525494B2 JP 11550676 A JP11550676 A JP 11550676A JP 11550676 A JP11550676 A JP 11550676A JP S5525494 B2 JPS5525494 B2 JP S5525494B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Led Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11550676A JPS5340274A (en) | 1976-09-27 | 1976-09-27 | Apparatus for controlling vapour pressure in liquiddgrowth furnace for semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11550676A JPS5340274A (en) | 1976-09-27 | 1976-09-27 | Apparatus for controlling vapour pressure in liquiddgrowth furnace for semiconductor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5340274A JPS5340274A (en) | 1978-04-12 |
JPS5525494B2 true JPS5525494B2 (en) | 1980-07-07 |
Family
ID=14664195
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11550676A Granted JPS5340274A (en) | 1976-09-27 | 1976-09-27 | Apparatus for controlling vapour pressure in liquiddgrowth furnace for semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5340274A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01168189U (en) * | 1988-05-18 | 1989-11-27 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA1239437A (en) * | 1984-12-24 | 1988-07-19 | Vortek Industries Ltd. | High intensity radiation method and apparatus having improved liquid vortex flow |
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1976
- 1976-09-27 JP JP11550676A patent/JPS5340274A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01168189U (en) * | 1988-05-18 | 1989-11-27 |
Also Published As
Publication number | Publication date |
---|---|
JPS5340274A (en) | 1978-04-12 |