JPS5525493B2 - - Google Patents

Info

Publication number
JPS5525493B2
JPS5525493B2 JP7717871A JP7717871A JPS5525493B2 JP S5525493 B2 JPS5525493 B2 JP S5525493B2 JP 7717871 A JP7717871 A JP 7717871A JP 7717871 A JP7717871 A JP 7717871A JP S5525493 B2 JPS5525493 B2 JP S5525493B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7717871A
Other languages
Japanese (ja)
Other versions
JPS4843581A (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7717871A priority Critical patent/JPS5525493B2/ja
Publication of JPS4843581A publication Critical patent/JPS4843581A/ja
Publication of JPS5525493B2 publication Critical patent/JPS5525493B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP7717871A 1971-10-04 1971-10-04 Expired JPS5525493B2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7717871A JPS5525493B2 (en:Method) 1971-10-04 1971-10-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7717871A JPS5525493B2 (en:Method) 1971-10-04 1971-10-04

Publications (2)

Publication Number Publication Date
JPS4843581A JPS4843581A (en:Method) 1973-06-23
JPS5525493B2 true JPS5525493B2 (en:Method) 1980-07-07

Family

ID=13626535

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7717871A Expired JPS5525493B2 (en:Method) 1971-10-04 1971-10-04

Country Status (1)

Country Link
JP (1) JPS5525493B2 (en:Method)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5837388B2 (ja) * 1975-02-03 1983-08-16 株式会社東芝 キソウセイチヨウホウホウ
JPS5643719A (en) * 1979-09-18 1981-04-22 Fujitsu Ltd Vapor-phase epitaxial growth

Also Published As

Publication number Publication date
JPS4843581A (en:Method) 1973-06-23

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