JPS5525037U - - Google Patents
Info
- Publication number
- JPS5525037U JPS5525037U JP10706878U JP10706878U JPS5525037U JP S5525037 U JPS5525037 U JP S5525037U JP 10706878 U JP10706878 U JP 10706878U JP 10706878 U JP10706878 U JP 10706878U JP S5525037 U JPS5525037 U JP S5525037U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10706878U JPS5525037U (de) | 1978-08-05 | 1978-08-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10706878U JPS5525037U (de) | 1978-08-05 | 1978-08-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5525037U true JPS5525037U (de) | 1980-02-18 |
Family
ID=29050831
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10706878U Pending JPS5525037U (de) | 1978-08-05 | 1978-08-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5525037U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6457637A (en) * | 1987-05-22 | 1989-03-03 | American Telephone & Telegraph | Method and apparatus for handling wafer |
-
1978
- 1978-08-05 JP JP10706878U patent/JPS5525037U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6457637A (en) * | 1987-05-22 | 1989-03-03 | American Telephone & Telegraph | Method and apparatus for handling wafer |
| JPH0322058B2 (de) * | 1987-05-22 | 1991-03-26 | Amerikan Terefuon Ando Teregurafu Co |