JPS5524696B2 - - Google Patents
Info
- Publication number
- JPS5524696B2 JPS5524696B2 JP4757875A JP4757875A JPS5524696B2 JP S5524696 B2 JPS5524696 B2 JP S5524696B2 JP 4757875 A JP4757875 A JP 4757875A JP 4757875 A JP4757875 A JP 4757875A JP S5524696 B2 JPS5524696 B2 JP S5524696B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Element Separation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4757875A JPS51123576A (en) | 1975-04-21 | 1975-04-21 | Semiconductor device production system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4757875A JPS51123576A (en) | 1975-04-21 | 1975-04-21 | Semiconductor device production system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51123576A JPS51123576A (en) | 1976-10-28 |
| JPS5524696B2 true JPS5524696B2 (OSRAM) | 1980-07-01 |
Family
ID=12779120
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4757875A Granted JPS51123576A (en) | 1975-04-21 | 1975-04-21 | Semiconductor device production system |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS51123576A (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60105822A (ja) * | 1983-11-15 | 1985-06-11 | Kaneko Agricult Mach Co Ltd | バ−ナにおける燃焼制御装置 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3796612A (en) * | 1971-08-05 | 1974-03-12 | Scient Micro Syst Inc | Semiconductor isolation method utilizing anisotropic etching and differential thermal oxidation |
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1975
- 1975-04-21 JP JP4757875A patent/JPS51123576A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60105822A (ja) * | 1983-11-15 | 1985-06-11 | Kaneko Agricult Mach Co Ltd | バ−ナにおける燃焼制御装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51123576A (en) | 1976-10-28 |