JPS5523916Y2 - - Google Patents
Info
- Publication number
- JPS5523916Y2 JPS5523916Y2 JP1974096880U JP9688074U JPS5523916Y2 JP S5523916 Y2 JPS5523916 Y2 JP S5523916Y2 JP 1974096880 U JP1974096880 U JP 1974096880U JP 9688074 U JP9688074 U JP 9688074U JP S5523916 Y2 JPS5523916 Y2 JP S5523916Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1974096880U JPS5523916Y2 (https=) | 1974-08-15 | 1974-08-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1974096880U JPS5523916Y2 (https=) | 1974-08-15 | 1974-08-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5127246U JPS5127246U (https=) | 1976-02-27 |
| JPS5523916Y2 true JPS5523916Y2 (https=) | 1980-06-07 |
Family
ID=28295500
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1974096880U Expired JPS5523916Y2 (https=) | 1974-08-15 | 1974-08-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5523916Y2 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3829373A (en) * | 1973-01-12 | 1974-08-13 | Coulter Information Systems | Thin film deposition apparatus using segmented target means |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5153696Y2 (https=) * | 1971-12-22 | 1976-12-22 |
-
1974
- 1974-08-15 JP JP1974096880U patent/JPS5523916Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5127246U (https=) | 1976-02-27 |