JPS5523916Y2 - - Google Patents

Info

Publication number
JPS5523916Y2
JPS5523916Y2 JP1974096880U JP9688074U JPS5523916Y2 JP S5523916 Y2 JPS5523916 Y2 JP S5523916Y2 JP 1974096880 U JP1974096880 U JP 1974096880U JP 9688074 U JP9688074 U JP 9688074U JP S5523916 Y2 JPS5523916 Y2 JP S5523916Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1974096880U
Other languages
Japanese (ja)
Other versions
JPS5127246U (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1974096880U priority Critical patent/JPS5523916Y2/ja
Publication of JPS5127246U publication Critical patent/JPS5127246U/ja
Application granted granted Critical
Publication of JPS5523916Y2 publication Critical patent/JPS5523916Y2/ja
Expired legal-status Critical Current

Links

JP1974096880U 1974-08-15 1974-08-15 Expired JPS5523916Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1974096880U JPS5523916Y2 (cg-RX-API-DMAC7.html) 1974-08-15 1974-08-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1974096880U JPS5523916Y2 (cg-RX-API-DMAC7.html) 1974-08-15 1974-08-15

Publications (2)

Publication Number Publication Date
JPS5127246U JPS5127246U (cg-RX-API-DMAC7.html) 1976-02-27
JPS5523916Y2 true JPS5523916Y2 (cg-RX-API-DMAC7.html) 1980-06-07

Family

ID=28295500

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1974096880U Expired JPS5523916Y2 (cg-RX-API-DMAC7.html) 1974-08-15 1974-08-15

Country Status (1)

Country Link
JP (1) JPS5523916Y2 (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3829373A (en) * 1973-01-12 1974-08-13 Coulter Information Systems Thin film deposition apparatus using segmented target means

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5153696Y2 (cg-RX-API-DMAC7.html) * 1971-12-22 1976-12-22

Also Published As

Publication number Publication date
JPS5127246U (cg-RX-API-DMAC7.html) 1976-02-27

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