JPS5522692U - - Google Patents

Info

Publication number
JPS5522692U
JPS5522692U JP10638778U JP10638778U JPS5522692U JP S5522692 U JPS5522692 U JP S5522692U JP 10638778 U JP10638778 U JP 10638778U JP 10638778 U JP10638778 U JP 10638778U JP S5522692 U JPS5522692 U JP S5522692U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10638778U
Other languages
Japanese (ja)
Other versions
JPS6135937Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1978106387U priority Critical patent/JPS6135937Y2/ja
Publication of JPS5522692U publication Critical patent/JPS5522692U/ja
Application granted granted Critical
Publication of JPS6135937Y2 publication Critical patent/JPS6135937Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Testing Or Calibration Of Command Recording Devices (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
JP1978106387U 1978-08-01 1978-08-01 Expired JPS6135937Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1978106387U JPS6135937Y2 (enExample) 1978-08-01 1978-08-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1978106387U JPS6135937Y2 (enExample) 1978-08-01 1978-08-01

Publications (2)

Publication Number Publication Date
JPS5522692U true JPS5522692U (enExample) 1980-02-14
JPS6135937Y2 JPS6135937Y2 (enExample) 1986-10-18

Family

ID=29049518

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1978106387U Expired JPS6135937Y2 (enExample) 1978-08-01 1978-08-01

Country Status (1)

Country Link
JP (1) JPS6135937Y2 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62200255U (enExample) * 1986-06-10 1987-12-19
JP2005233928A (ja) * 2004-01-23 2005-09-02 Horiba Ltd 基板検査装置
JP2010286493A (ja) * 2004-01-23 2010-12-24 Horiba Ltd 基板検査装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3819945A (en) * 1971-07-01 1974-06-25 Environmental Data Corp Spectrometers
JPS5248506A (en) * 1975-10-15 1977-04-18 Mazda Motor Corp Wear-resisting high phosphorus sintered alloy

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3819945A (en) * 1971-07-01 1974-06-25 Environmental Data Corp Spectrometers
JPS5248506A (en) * 1975-10-15 1977-04-18 Mazda Motor Corp Wear-resisting high phosphorus sintered alloy

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62200255U (enExample) * 1986-06-10 1987-12-19
JP2005233928A (ja) * 2004-01-23 2005-09-02 Horiba Ltd 基板検査装置
JP2010286493A (ja) * 2004-01-23 2010-12-24 Horiba Ltd 基板検査装置

Also Published As

Publication number Publication date
JPS6135937Y2 (enExample) 1986-10-18

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