JPS5522019B2 - - Google Patents
Info
- Publication number
- JPS5522019B2 JPS5522019B2 JP14743875A JP14743875A JPS5522019B2 JP S5522019 B2 JPS5522019 B2 JP S5522019B2 JP 14743875 A JP14743875 A JP 14743875A JP 14743875 A JP14743875 A JP 14743875A JP S5522019 B2 JPS5522019 B2 JP S5522019B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14743875A JPS5272161A (en) | 1975-12-12 | 1975-12-12 | Process for cleaning silicon wafers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14743875A JPS5272161A (en) | 1975-12-12 | 1975-12-12 | Process for cleaning silicon wafers |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5272161A JPS5272161A (en) | 1977-06-16 |
| JPS5522019B2 true JPS5522019B2 (cs) | 1980-06-13 |
Family
ID=15430325
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14743875A Granted JPS5272161A (en) | 1975-12-12 | 1975-12-12 | Process for cleaning silicon wafers |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5272161A (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6255048U (cs) * | 1985-09-26 | 1987-04-06 |
-
1975
- 1975-12-12 JP JP14743875A patent/JPS5272161A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6255048U (cs) * | 1985-09-26 | 1987-04-06 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5272161A (en) | 1977-06-16 |