JPS5521467B2 - - Google Patents
Info
- Publication number
- JPS5521467B2 JPS5521467B2 JP15029975A JP15029975A JPS5521467B2 JP S5521467 B2 JPS5521467 B2 JP S5521467B2 JP 15029975 A JP15029975 A JP 15029975A JP 15029975 A JP15029975 A JP 15029975A JP S5521467 B2 JPS5521467 B2 JP S5521467B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50150299A JPS5273683A (en) | 1975-12-16 | 1975-12-16 | Semiconductor thin film pressure transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50150299A JPS5273683A (en) | 1975-12-16 | 1975-12-16 | Semiconductor thin film pressure transducer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5273683A JPS5273683A (en) | 1977-06-20 |
| JPS5521467B2 true JPS5521467B2 (enExample) | 1980-06-10 |
Family
ID=15493958
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50150299A Granted JPS5273683A (en) | 1975-12-16 | 1975-12-16 | Semiconductor thin film pressure transducer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5273683A (enExample) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5313957B2 (enExample) * | 1971-12-28 | 1978-05-13 |
-
1975
- 1975-12-16 JP JP50150299A patent/JPS5273683A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5273683A (en) | 1977-06-20 |