JPS5521467B2 - - Google Patents

Info

Publication number
JPS5521467B2
JPS5521467B2 JP15029975A JP15029975A JPS5521467B2 JP S5521467 B2 JPS5521467 B2 JP S5521467B2 JP 15029975 A JP15029975 A JP 15029975A JP 15029975 A JP15029975 A JP 15029975A JP S5521467 B2 JPS5521467 B2 JP S5521467B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15029975A
Other languages
Japanese (ja)
Other versions
JPS5273683A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP50150299A priority Critical patent/JPS5273683A/ja
Publication of JPS5273683A publication Critical patent/JPS5273683A/ja
Publication of JPS5521467B2 publication Critical patent/JPS5521467B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP50150299A 1975-12-16 1975-12-16 Semiconductor thin film pressure transducer Granted JPS5273683A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50150299A JPS5273683A (en) 1975-12-16 1975-12-16 Semiconductor thin film pressure transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50150299A JPS5273683A (en) 1975-12-16 1975-12-16 Semiconductor thin film pressure transducer

Publications (2)

Publication Number Publication Date
JPS5273683A JPS5273683A (en) 1977-06-20
JPS5521467B2 true JPS5521467B2 (enrdf_load_stackoverflow) 1980-06-10

Family

ID=15493958

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50150299A Granted JPS5273683A (en) 1975-12-16 1975-12-16 Semiconductor thin film pressure transducer

Country Status (1)

Country Link
JP (1) JPS5273683A (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5313957B2 (enrdf_load_stackoverflow) * 1971-12-28 1978-05-13

Also Published As

Publication number Publication date
JPS5273683A (en) 1977-06-20

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