JPS5521341Y2 - - Google Patents
Info
- Publication number
- JPS5521341Y2 JPS5521341Y2 JP1975003574U JP357475U JPS5521341Y2 JP S5521341 Y2 JPS5521341 Y2 JP S5521341Y2 JP 1975003574 U JP1975003574 U JP 1975003574U JP 357475 U JP357475 U JP 357475U JP S5521341 Y2 JPS5521341 Y2 JP S5521341Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1975003574U JPS5521341Y2 (https=) | 1974-12-28 | 1974-12-28 | |
| CA242,588A CA1044379A (en) | 1974-12-28 | 1975-12-24 | Wafer transfer device |
| US05/645,020 US4103232A (en) | 1974-12-28 | 1975-12-29 | Wafer transfer device |
| GB53002/75A GB1531429A (en) | 1974-12-28 | 1975-12-29 | Apparatus for handling semi-conductor wafers to facilitate making electrical tests on semiconductor devices and testing method |
| DE19752558963 DE2558963A1 (de) | 1974-12-28 | 1975-12-29 | Vorrichtung zur anbringung von halbleiterplaettchen |
| NL7515149A NL7515149A (nl) | 1974-12-28 | 1975-12-29 | Inrichting voor het hanteren van wafels van halfgeleidend materiaal. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1975003574U JPS5521341Y2 (https=) | 1974-12-28 | 1974-12-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5186969U JPS5186969U (https=) | 1976-07-12 |
| JPS5521341Y2 true JPS5521341Y2 (https=) | 1980-05-22 |
Family
ID=28053580
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1975003574U Expired JPS5521341Y2 (https=) | 1974-12-28 | 1974-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5521341Y2 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS592135U (ja) * | 1982-06-28 | 1984-01-09 | 株式会社東芝 | ウエハ回転装置 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5216384B2 (https=) * | 1972-05-02 | 1977-05-09 |
-
1974
- 1974-12-28 JP JP1975003574U patent/JPS5521341Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5186969U (https=) | 1976-07-12 |