JPS5521340B2 - - Google Patents
Info
- Publication number
- JPS5521340B2 JPS5521340B2 JP10785972A JP10785972A JPS5521340B2 JP S5521340 B2 JPS5521340 B2 JP S5521340B2 JP 10785972 A JP10785972 A JP 10785972A JP 10785972 A JP10785972 A JP 10785972A JP S5521340 B2 JPS5521340 B2 JP S5521340B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Photosensitive Polymer And Photoresist Processing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10785972A JPS5521340B2 (en:Method) | 1972-10-30 | 1972-10-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10785972A JPS5521340B2 (en:Method) | 1972-10-30 | 1972-10-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4967702A JPS4967702A (en:Method) | 1974-07-01 |
| JPS5521340B2 true JPS5521340B2 (en:Method) | 1980-06-09 |
Family
ID=14469864
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10785972A Expired JPS5521340B2 (en:Method) | 1972-10-30 | 1972-10-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5521340B2 (en:Method) |
-
1972
- 1972-10-30 JP JP10785972A patent/JPS5521340B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4967702A (en:Method) | 1974-07-01 |