JPS5521338Y2 - - Google Patents

Info

Publication number
JPS5521338Y2
JPS5521338Y2 JP1975018348U JP1834875U JPS5521338Y2 JP S5521338 Y2 JPS5521338 Y2 JP S5521338Y2 JP 1975018348 U JP1975018348 U JP 1975018348U JP 1834875 U JP1834875 U JP 1834875U JP S5521338 Y2 JPS5521338 Y2 JP S5521338Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1975018348U
Other languages
Japanese (ja)
Other versions
JPS51100053U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1975018348U priority Critical patent/JPS5521338Y2/ja
Publication of JPS51100053U publication Critical patent/JPS51100053U/ja
Application granted granted Critical
Publication of JPS5521338Y2 publication Critical patent/JPS5521338Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP1975018348U 1975-02-07 1975-02-07 Expired JPS5521338Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1975018348U JPS5521338Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-02-07 1975-02-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1975018348U JPS5521338Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-02-07 1975-02-07

Publications (2)

Publication Number Publication Date
JPS51100053U JPS51100053U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-08-11
JPS5521338Y2 true JPS5521338Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-05-22

Family

ID=28104122

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1975018348U Expired JPS5521338Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-02-07 1975-02-07

Country Status (1)

Country Link
JP (1) JPS5521338Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4911285A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-05-29 1974-01-31
JPS5341032B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-02-26 1978-10-31

Also Published As

Publication number Publication date
JPS51100053U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-08-11

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