JPS552118U - - Google Patents
Info
- Publication number
- JPS552118U JPS552118U JP8435978U JP8435978U JPS552118U JP S552118 U JPS552118 U JP S552118U JP 8435978 U JP8435978 U JP 8435978U JP 8435978 U JP8435978 U JP 8435978U JP S552118 U JPS552118 U JP S552118U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8435978U JPS552118U (cs) | 1978-06-20 | 1978-06-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8435978U JPS552118U (cs) | 1978-06-20 | 1978-06-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS552118U true JPS552118U (cs) | 1980-01-09 |
Family
ID=29006977
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8435978U Pending JPS552118U (cs) | 1978-06-20 | 1978-06-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS552118U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5875832A (ja) * | 1981-10-30 | 1983-05-07 | Fujitsu Ltd | 荷電ビ−ム露光装置用の角形アパ−チヤ作成方法 |
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1978
- 1978-06-20 JP JP8435978U patent/JPS552118U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5875832A (ja) * | 1981-10-30 | 1983-05-07 | Fujitsu Ltd | 荷電ビ−ム露光装置用の角形アパ−チヤ作成方法 |