JPS5521108B2 - - Google Patents
Info
- Publication number
- JPS5521108B2 JPS5521108B2 JP8924975A JP8924975A JPS5521108B2 JP S5521108 B2 JPS5521108 B2 JP S5521108B2 JP 8924975 A JP8924975 A JP 8924975A JP 8924975 A JP8924975 A JP 8924975A JP S5521108 B2 JPS5521108 B2 JP S5521108B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Manufacturing Of Printed Wiring (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8924975A JPS5213437A (en) | 1975-07-23 | 1975-07-23 | Apparatus for producing thin film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8924975A JPS5213437A (en) | 1975-07-23 | 1975-07-23 | Apparatus for producing thin film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5213437A JPS5213437A (en) | 1977-02-01 |
| JPS5521108B2 true JPS5521108B2 (en, 2012) | 1980-06-07 |
Family
ID=13965474
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8924975A Granted JPS5213437A (en) | 1975-07-23 | 1975-07-23 | Apparatus for producing thin film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5213437A (en, 2012) |
-
1975
- 1975-07-23 JP JP8924975A patent/JPS5213437A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5213437A (en) | 1977-02-01 |