JPS5521082Y2 - - Google Patents

Info

Publication number
JPS5521082Y2
JPS5521082Y2 JP13440775U JP13440775U JPS5521082Y2 JP S5521082 Y2 JPS5521082 Y2 JP S5521082Y2 JP 13440775 U JP13440775 U JP 13440775U JP 13440775 U JP13440775 U JP 13440775U JP S5521082 Y2 JPS5521082 Y2 JP S5521082Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13440775U
Other languages
Japanese (ja)
Other versions
JPS5248356U (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13440775U priority Critical patent/JPS5521082Y2/ja
Publication of JPS5248356U publication Critical patent/JPS5248356U/ja
Application granted granted Critical
Publication of JPS5521082Y2 publication Critical patent/JPS5521082Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Sampling And Sample Adjustment (AREA)
  • Physical Vapour Deposition (AREA)
JP13440775U 1975-09-30 1975-09-30 Expired JPS5521082Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13440775U JPS5521082Y2 (en:Method) 1975-09-30 1975-09-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13440775U JPS5521082Y2 (en:Method) 1975-09-30 1975-09-30

Publications (2)

Publication Number Publication Date
JPS5248356U JPS5248356U (en:Method) 1977-04-06
JPS5521082Y2 true JPS5521082Y2 (en:Method) 1980-05-21

Family

ID=28614458

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13440775U Expired JPS5521082Y2 (en:Method) 1975-09-30 1975-09-30

Country Status (1)

Country Link
JP (1) JPS5521082Y2 (en:Method)

Also Published As

Publication number Publication date
JPS5248356U (en:Method) 1977-04-06

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