JPS5520746Y2 - - Google Patents
Info
- Publication number
- JPS5520746Y2 JPS5520746Y2 JP730575U JP730575U JPS5520746Y2 JP S5520746 Y2 JPS5520746 Y2 JP S5520746Y2 JP 730575 U JP730575 U JP 730575U JP 730575 U JP730575 U JP 730575U JP S5520746 Y2 JPS5520746 Y2 JP S5520746Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP730575U JPS5520746Y2 (https=) | 1975-01-13 | 1975-01-13 | |
| GB4345975A GB1483966A (en) | 1974-10-23 | 1975-10-22 | Vapourized-metal cluster ion source and ionized-cluster beam deposition |
| US05/625,041 US4152478A (en) | 1974-10-23 | 1975-10-23 | Ionized-cluster deposited on a substrate and method of depositing ionized cluster on a substrate |
| DE2547552A DE2547552B2 (de) | 1974-10-23 | 1975-10-23 | Schichtaufdampfverfahren und -einrichtung |
| US06/011,917 US4217855A (en) | 1974-10-23 | 1979-02-13 | Vaporized-metal cluster ion source and ionized-cluster beam deposition device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP730575U JPS5520746Y2 (https=) | 1975-01-13 | 1975-01-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5187648U JPS5187648U (https=) | 1976-07-14 |
| JPS5520746Y2 true JPS5520746Y2 (https=) | 1980-05-19 |
Family
ID=28073276
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP730575U Expired JPS5520746Y2 (https=) | 1974-10-23 | 1975-01-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5520746Y2 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100480363B1 (ko) * | 2002-04-09 | 2005-03-30 | 네오뷰코오롱 주식회사 | 증발 증착 셀 |
-
1975
- 1975-01-13 JP JP730575U patent/JPS5520746Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5187648U (https=) | 1976-07-14 |