JPS5520746Y2 - - Google Patents

Info

Publication number
JPS5520746Y2
JPS5520746Y2 JP730575U JP730575U JPS5520746Y2 JP S5520746 Y2 JPS5520746 Y2 JP S5520746Y2 JP 730575 U JP730575 U JP 730575U JP 730575 U JP730575 U JP 730575U JP S5520746 Y2 JPS5520746 Y2 JP S5520746Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP730575U
Other languages
Japanese (ja)
Other versions
JPS5187648U (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP730575U priority Critical patent/JPS5520746Y2/ja
Priority to GB4345975A priority patent/GB1483966A/en
Priority to US05/625,041 priority patent/US4152478A/en
Priority to DE2547552A priority patent/DE2547552B2/de
Publication of JPS5187648U publication Critical patent/JPS5187648U/ja
Priority to US06/011,917 priority patent/US4217855A/en
Application granted granted Critical
Publication of JPS5520746Y2 publication Critical patent/JPS5520746Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP730575U 1974-10-23 1975-01-13 Expired JPS5520746Y2 (en:Method)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP730575U JPS5520746Y2 (en:Method) 1975-01-13 1975-01-13
GB4345975A GB1483966A (en) 1974-10-23 1975-10-22 Vapourized-metal cluster ion source and ionized-cluster beam deposition
US05/625,041 US4152478A (en) 1974-10-23 1975-10-23 Ionized-cluster deposited on a substrate and method of depositing ionized cluster on a substrate
DE2547552A DE2547552B2 (de) 1974-10-23 1975-10-23 Schichtaufdampfverfahren und -einrichtung
US06/011,917 US4217855A (en) 1974-10-23 1979-02-13 Vaporized-metal cluster ion source and ionized-cluster beam deposition device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP730575U JPS5520746Y2 (en:Method) 1975-01-13 1975-01-13

Publications (2)

Publication Number Publication Date
JPS5187648U JPS5187648U (en:Method) 1976-07-14
JPS5520746Y2 true JPS5520746Y2 (en:Method) 1980-05-19

Family

ID=28073276

Family Applications (1)

Application Number Title Priority Date Filing Date
JP730575U Expired JPS5520746Y2 (en:Method) 1974-10-23 1975-01-13

Country Status (1)

Country Link
JP (1) JPS5520746Y2 (en:Method)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100480363B1 (ko) * 2002-04-09 2005-03-30 네오뷰코오롱 주식회사 증발 증착 셀

Also Published As

Publication number Publication date
JPS5187648U (en:Method) 1976-07-14

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