JPS5520636B2 - - Google Patents

Info

Publication number
JPS5520636B2
JPS5520636B2 JP3528573A JP3528573A JPS5520636B2 JP S5520636 B2 JPS5520636 B2 JP S5520636B2 JP 3528573 A JP3528573 A JP 3528573A JP 3528573 A JP3528573 A JP 3528573A JP S5520636 B2 JPS5520636 B2 JP S5520636B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3528573A
Other languages
Japanese (ja)
Other versions
JPS49122960A (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3528573A priority Critical patent/JPS5520636B2/ja
Priority to GB1274374A priority patent/GB1466161A/en
Priority to US05/454,808 priority patent/US3944829A/en
Publication of JPS49122960A publication Critical patent/JPS49122960A/ja
Publication of JPS5520636B2 publication Critical patent/JPS5520636B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Picture Signal Circuits (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Image Processing (AREA)
JP3528573A 1973-03-27 1973-03-27 Expired JPS5520636B2 (enExample)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP3528573A JPS5520636B2 (enExample) 1973-03-27 1973-03-27
GB1274374A GB1466161A (en) 1973-03-27 1974-03-21 Method and apparatus for video signal processing
US05/454,808 US3944829A (en) 1973-03-27 1974-03-26 Method and apparatus for processing a video signal from a scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3528573A JPS5520636B2 (enExample) 1973-03-27 1973-03-27

Publications (2)

Publication Number Publication Date
JPS49122960A JPS49122960A (enExample) 1974-11-25
JPS5520636B2 true JPS5520636B2 (enExample) 1980-06-04

Family

ID=12437490

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3528573A Expired JPS5520636B2 (enExample) 1973-03-27 1973-03-27

Country Status (3)

Country Link
US (1) US3944829A (enExample)
JP (1) JPS5520636B2 (enExample)
GB (1) GB1466161A (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6245422Y2 (enExample) * 1981-02-04 1987-12-04
US4387304A (en) * 1981-04-06 1983-06-07 Mcdonnell Douglas Corporation Phase dependent SEM IC chip testing with voltage contrast
EP0200893A1 (de) * 1985-03-22 1986-11-12 Siemens Aktiengesellschaft Verfahren zur Hervorhebung eines Objektbereichs auf einer vom Primärstrahl eines Rastermikroskops abgetasteten Probenfläche und Anordnungen zur Durchführung desselben
GB2418061B (en) * 2004-09-03 2006-10-18 Zeiss Carl Smt Ltd Scanning particle beam instrument
US7888640B2 (en) * 2007-06-18 2011-02-15 Hitachi High-Technologies Corporation Scanning electron microscope and method of imaging an object by using the scanning electron microscope

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3614311A (en) * 1968-02-28 1971-10-19 Hitachi Ltd Apparatus for simultaneously displaying a plurality of images of an object being analyzed in an electron beam device
US3549883A (en) * 1968-10-07 1970-12-22 Gen Electric Scanning electron microscope wherein an image is formed as a function of specimen current
US3829691A (en) * 1969-09-22 1974-08-13 Perkin Elmer Corp Image signal enhancement system for a scanning electron microscope
US3783281A (en) * 1972-02-03 1974-01-01 Perkin Elmer Corp Electron microscope

Also Published As

Publication number Publication date
JPS49122960A (enExample) 1974-11-25
GB1466161A (en) 1977-03-02
US3944829A (en) 1976-03-16

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