JPS552000U - - Google Patents

Info

Publication number
JPS552000U
JPS552000U JP10166379U JP10166379U JPS552000U JP S552000 U JPS552000 U JP S552000U JP 10166379 U JP10166379 U JP 10166379U JP 10166379 U JP10166379 U JP 10166379U JP S552000 U JPS552000 U JP S552000U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10166379U
Other versions
JPS618235Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1979101663U priority Critical patent/JPS618235Y2/ja
Publication of JPS552000U publication Critical patent/JPS552000U/ja
Application granted granted Critical
Publication of JPS618235Y2 publication Critical patent/JPS618235Y2/ja
Expired legal-status Critical Current

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JP1979101663U 1979-07-23 1979-07-23 Expired JPS618235Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1979101663U JPS618235Y2 (ja) 1979-07-23 1979-07-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1979101663U JPS618235Y2 (ja) 1979-07-23 1979-07-23

Publications (2)

Publication Number Publication Date
JPS552000U true JPS552000U (ja) 1980-01-08
JPS618235Y2 JPS618235Y2 (ja) 1986-03-13

Family

ID=29040505

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1979101663U Expired JPS618235Y2 (ja) 1979-07-23 1979-07-23

Country Status (1)

Country Link
JP (1) JPS618235Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58163947U (ja) * 1982-04-27 1983-11-01 株式会社東芝 露光装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58163947U (ja) * 1982-04-27 1983-11-01 株式会社東芝 露光装置

Also Published As

Publication number Publication date
JPS618235Y2 (ja) 1986-03-13

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