JPS5519064B2 - - Google Patents
Info
- Publication number
- JPS5519064B2 JPS5519064B2 JP5543076A JP5543076A JPS5519064B2 JP S5519064 B2 JPS5519064 B2 JP S5519064B2 JP 5543076 A JP5543076 A JP 5543076A JP 5543076 A JP5543076 A JP 5543076A JP S5519064 B2 JPS5519064 B2 JP S5519064B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Local Oxidation Of Silicon (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5543076A JPS52139387A (en) | 1976-05-17 | 1976-05-17 | Production of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5543076A JPS52139387A (en) | 1976-05-17 | 1976-05-17 | Production of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52139387A JPS52139387A (en) | 1977-11-21 |
| JPS5519064B2 true JPS5519064B2 (ru) | 1980-05-23 |
Family
ID=12998359
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5543076A Granted JPS52139387A (en) | 1976-05-17 | 1976-05-17 | Production of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52139387A (ru) |
-
1976
- 1976-05-17 JP JP5543076A patent/JPS52139387A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52139387A (en) | 1977-11-21 |