JPS5518996Y2 - - Google Patents

Info

Publication number
JPS5518996Y2
JPS5518996Y2 JP17071676U JP17071676U JPS5518996Y2 JP S5518996 Y2 JPS5518996 Y2 JP S5518996Y2 JP 17071676 U JP17071676 U JP 17071676U JP 17071676 U JP17071676 U JP 17071676U JP S5518996 Y2 JPS5518996 Y2 JP S5518996Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP17071676U
Other languages
Japanese (ja)
Other versions
JPS5385963U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17071676U priority Critical patent/JPS5518996Y2/ja
Publication of JPS5385963U publication Critical patent/JPS5385963U/ja
Application granted granted Critical
Publication of JPS5518996Y2 publication Critical patent/JPS5518996Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP17071676U 1976-12-16 1976-12-16 Expired JPS5518996Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17071676U JPS5518996Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-12-16 1976-12-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17071676U JPS5518996Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-12-16 1976-12-16

Publications (2)

Publication Number Publication Date
JPS5385963U JPS5385963U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1978-07-15
JPS5518996Y2 true JPS5518996Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-05-06

Family

ID=28778256

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17071676U Expired JPS5518996Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-12-16 1976-12-16

Country Status (1)

Country Link
JP (1) JPS5518996Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS5385963U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1978-07-15

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