JPS5517469Y2 - - Google Patents

Info

Publication number
JPS5517469Y2
JPS5517469Y2 JP1976092071U JP9207176U JPS5517469Y2 JP S5517469 Y2 JPS5517469 Y2 JP S5517469Y2 JP 1976092071 U JP1976092071 U JP 1976092071U JP 9207176 U JP9207176 U JP 9207176U JP S5517469 Y2 JPS5517469 Y2 JP S5517469Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1976092071U
Other languages
Japanese (ja)
Other versions
JPS5310265U (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976092071U priority Critical patent/JPS5517469Y2/ja
Publication of JPS5310265U publication Critical patent/JPS5310265U/ja
Application granted granted Critical
Publication of JPS5517469Y2 publication Critical patent/JPS5517469Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP1976092071U 1976-07-09 1976-07-09 Expired JPS5517469Y2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976092071U JPS5517469Y2 (de) 1976-07-09 1976-07-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976092071U JPS5517469Y2 (de) 1976-07-09 1976-07-09

Publications (2)

Publication Number Publication Date
JPS5310265U JPS5310265U (de) 1978-01-27
JPS5517469Y2 true JPS5517469Y2 (de) 1980-04-23

Family

ID=28702665

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976092071U Expired JPS5517469Y2 (de) 1976-07-09 1976-07-09

Country Status (1)

Country Link
JP (1) JPS5517469Y2 (de)

Also Published As

Publication number Publication date
JPS5310265U (de) 1978-01-27

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