JPS55167178U - - Google Patents

Info

Publication number
JPS55167178U
JPS55167178U JP6641279U JP6641279U JPS55167178U JP S55167178 U JPS55167178 U JP S55167178U JP 6641279 U JP6641279 U JP 6641279U JP 6641279 U JP6641279 U JP 6641279U JP S55167178 U JPS55167178 U JP S55167178U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6641279U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6641279U priority Critical patent/JPS55167178U/ja
Publication of JPS55167178U publication Critical patent/JPS55167178U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP6641279U 1979-05-18 1979-05-18 Pending JPS55167178U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6641279U JPS55167178U (enExample) 1979-05-18 1979-05-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6641279U JPS55167178U (enExample) 1979-05-18 1979-05-18

Publications (1)

Publication Number Publication Date
JPS55167178U true JPS55167178U (enExample) 1980-12-01

Family

ID=29300366

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6641279U Pending JPS55167178U (enExample) 1979-05-18 1979-05-18

Country Status (1)

Country Link
JP (1) JPS55167178U (enExample)

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