JPS55167129A - Manufacture of oxide film - Google Patents
Manufacture of oxide filmInfo
- Publication number
- JPS55167129A JPS55167129A JP7203979A JP7203979A JPS55167129A JP S55167129 A JPS55167129 A JP S55167129A JP 7203979 A JP7203979 A JP 7203979A JP 7203979 A JP7203979 A JP 7203979A JP S55167129 A JPS55167129 A JP S55167129A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- metal oxide
- alloy
- thermistor
- oxide film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Chemically Coating (AREA)
Abstract
PURPOSE: To obtain highly homogeneous oxide film giving a small-sized thermistor with little unevenness by maintaining an alloy consisting of the constituent metals of a metal oxide at a high temp. in an O2 atmosphere to oxidize the alloy when the metal oxide is manufactured.
CONSTITUTION: In manufacture of a metal oxide of M1xM2y...MijOz (each of M1WMi is a metal element), an alloy of M1xM2y...Mij consisting of the constituent metals of the metal oxide is oxidized by being maintained at a high temp. in an O2 atmosphere to easily obtain a highly homogeneous and highly purified oxide film of M1xM2y...MijOz. The above-mentioned alloy contains at least one kind of transition metal and, e.g., consists of equimolar Ba and Ti. When this film is applied to manufacture of a bead type thermistor, a small-sized thermistor with high reliability and little unevenness in thermistor characteristics is obtd.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7203979A JPS55167129A (en) | 1979-06-08 | 1979-06-08 | Manufacture of oxide film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7203979A JPS55167129A (en) | 1979-06-08 | 1979-06-08 | Manufacture of oxide film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55167129A true JPS55167129A (en) | 1980-12-26 |
Family
ID=13477852
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7203979A Pending JPS55167129A (en) | 1979-06-08 | 1979-06-08 | Manufacture of oxide film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55167129A (en) |
-
1979
- 1979-06-08 JP JP7203979A patent/JPS55167129A/en active Pending
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