JPS55167129A - Manufacture of oxide film - Google Patents

Manufacture of oxide film

Info

Publication number
JPS55167129A
JPS55167129A JP7203979A JP7203979A JPS55167129A JP S55167129 A JPS55167129 A JP S55167129A JP 7203979 A JP7203979 A JP 7203979A JP 7203979 A JP7203979 A JP 7203979A JP S55167129 A JPS55167129 A JP S55167129A
Authority
JP
Japan
Prior art keywords
manufacture
metal oxide
alloy
thermistor
oxide film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7203979A
Other languages
Japanese (ja)
Inventor
Hozumi Hirota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP7203979A priority Critical patent/JPS55167129A/en
Publication of JPS55167129A publication Critical patent/JPS55167129A/en
Pending legal-status Critical Current

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  • Physical Vapour Deposition (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Chemically Coating (AREA)

Abstract

PURPOSE: To obtain highly homogeneous oxide film giving a small-sized thermistor with little unevenness by maintaining an alloy consisting of the constituent metals of a metal oxide at a high temp. in an O2 atmosphere to oxidize the alloy when the metal oxide is manufactured.
CONSTITUTION: In manufacture of a metal oxide of M1xM2y...MijOz (each of M1WMi is a metal element), an alloy of M1xM2y...Mij consisting of the constituent metals of the metal oxide is oxidized by being maintained at a high temp. in an O2 atmosphere to easily obtain a highly homogeneous and highly purified oxide film of M1xM2y...MijOz. The above-mentioned alloy contains at least one kind of transition metal and, e.g., consists of equimolar Ba and Ti. When this film is applied to manufacture of a bead type thermistor, a small-sized thermistor with high reliability and little unevenness in thermistor characteristics is obtd.
COPYRIGHT: (C)1980,JPO&Japio
JP7203979A 1979-06-08 1979-06-08 Manufacture of oxide film Pending JPS55167129A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7203979A JPS55167129A (en) 1979-06-08 1979-06-08 Manufacture of oxide film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7203979A JPS55167129A (en) 1979-06-08 1979-06-08 Manufacture of oxide film

Publications (1)

Publication Number Publication Date
JPS55167129A true JPS55167129A (en) 1980-12-26

Family

ID=13477852

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7203979A Pending JPS55167129A (en) 1979-06-08 1979-06-08 Manufacture of oxide film

Country Status (1)

Country Link
JP (1) JPS55167129A (en)

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