JPS5516624B2 - - Google Patents
Info
- Publication number
- JPS5516624B2 JPS5516624B2 JP8816572A JP8816572A JPS5516624B2 JP S5516624 B2 JPS5516624 B2 JP S5516624B2 JP 8816572 A JP8816572 A JP 8816572A JP 8816572 A JP8816572 A JP 8816572A JP S5516624 B2 JPS5516624 B2 JP S5516624B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Seasonings (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8816572A JPS5516624B2 (en:Method) | 1972-09-01 | 1972-09-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8816572A JPS5516624B2 (en:Method) | 1972-09-01 | 1972-09-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4942858A JPS4942858A (en:Method) | 1974-04-22 |
| JPS5516624B2 true JPS5516624B2 (en:Method) | 1980-05-06 |
Family
ID=13935300
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8816572A Expired JPS5516624B2 (en:Method) | 1972-09-01 | 1972-09-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5516624B2 (en:Method) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1256755C (zh) | 2000-08-11 | 2006-05-17 | 东京毅力科创株式会社 | 基板处理装置及处理方法 |
-
1972
- 1972-09-01 JP JP8816572A patent/JPS5516624B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4942858A (en:Method) | 1974-04-22 |