JPS55166053A - Method of inspecting thin film capacitor - Google Patents

Method of inspecting thin film capacitor

Info

Publication number
JPS55166053A
JPS55166053A JP7297979A JP7297979A JPS55166053A JP S55166053 A JPS55166053 A JP S55166053A JP 7297979 A JP7297979 A JP 7297979A JP 7297979 A JP7297979 A JP 7297979A JP S55166053 A JPS55166053 A JP S55166053A
Authority
JP
Japan
Prior art keywords
capacitor
infrared ray
infinitesimal
leakage current
irradiated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7297979A
Other languages
Japanese (ja)
Inventor
Atsushi Aritomo
Tatsuo Shirakawa
Shinji Yoshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP7297979A priority Critical patent/JPS55166053A/en
Publication of JPS55166053A publication Critical patent/JPS55166053A/en
Pending legal-status Critical Current

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Landscapes

  • Testing Electric Properties And Detecting Electric Faults (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To readily discriminate a thin film capacitor at low voltage application by imparting infinitesimal temperature change thereto by measuring the infinitesimal change of a leakage current occurred when an infrared ray is periodically irradiated to the capacitor to be inspected.
CONSTITUTION: A DC power supply 6 of several volts and an amplifier circuit 7 are connected first to a capacitor 5, and an infrared ray is intermittently irradiated to the capacitor. In this manner, the capacitor 5 varies at infinitesimal temperature change to thus cause infinitesimal change ΔIl of a leakage current. The smaller the infinitesimal change ΔIl of the leakage current is, the smaller the leakage current. The infrared ray is irradiated by an infrared ray heater 4 having an infrared ray load of 0.8kW and 630Hz, and is irradiated through a transmission window 1 of a rotary disk 2 to the capacitor 5 by a synchronous motor 3.
COPYRIGHT: (C)1980,JPO&Japio
JP7297979A 1979-06-12 1979-06-12 Method of inspecting thin film capacitor Pending JPS55166053A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7297979A JPS55166053A (en) 1979-06-12 1979-06-12 Method of inspecting thin film capacitor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7297979A JPS55166053A (en) 1979-06-12 1979-06-12 Method of inspecting thin film capacitor

Publications (1)

Publication Number Publication Date
JPS55166053A true JPS55166053A (en) 1980-12-24

Family

ID=13505007

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7297979A Pending JPS55166053A (en) 1979-06-12 1979-06-12 Method of inspecting thin film capacitor

Country Status (1)

Country Link
JP (1) JPS55166053A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57144473A (en) * 1981-03-02 1982-09-07 Ckd Corp Discriminating method of leakage current characteristic of capacitor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57144473A (en) * 1981-03-02 1982-09-07 Ckd Corp Discriminating method of leakage current characteristic of capacitor

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