JPS55158154U - - Google Patents
Info
- Publication number
- JPS55158154U JPS55158154U JP5809779U JP5809779U JPS55158154U JP S55158154 U JPS55158154 U JP S55158154U JP 5809779 U JP5809779 U JP 5809779U JP 5809779 U JP5809779 U JP 5809779U JP S55158154 U JPS55158154 U JP S55158154U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5809779U JPS55158154U (ja�@�@) | 1979-04-28 | 1979-04-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5809779U JPS55158154U (ja�@�@) | 1979-04-28 | 1979-04-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS55158154U true JPS55158154U (ja�@�@) | 1980-11-13 |
Family
ID=29292158
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5809779U Pending JPS55158154U (ja�@�@) | 1979-04-28 | 1979-04-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55158154U (ja�@�@) |
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1979
- 1979-04-28 JP JP5809779U patent/JPS55158154U/ja active Pending