JPS55155866U - - Google Patents
Info
- Publication number
- JPS55155866U JPS55155866U JP5213079U JP5213079U JPS55155866U JP S55155866 U JPS55155866 U JP S55155866U JP 5213079 U JP5213079 U JP 5213079U JP 5213079 U JP5213079 U JP 5213079U JP S55155866 U JPS55155866 U JP S55155866U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1979052130U JPS584923Y2 (ja) | 1979-04-20 | 1979-04-20 | 横型スパッタリング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1979052130U JPS584923Y2 (ja) | 1979-04-20 | 1979-04-20 | 横型スパッタリング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55155866U true JPS55155866U (enExample) | 1980-11-10 |
| JPS584923Y2 JPS584923Y2 (ja) | 1983-01-27 |
Family
ID=29288494
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1979052130U Expired JPS584923Y2 (ja) | 1979-04-20 | 1979-04-20 | 横型スパッタリング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS584923Y2 (enExample) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5295581A (en) * | 1976-02-09 | 1977-08-11 | Anelva Corp | Sputiering apparatus |
| JPS536282A (en) * | 1976-07-07 | 1978-01-20 | Philips Nv | Spattering process and apparatus |
-
1979
- 1979-04-20 JP JP1979052130U patent/JPS584923Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5295581A (en) * | 1976-02-09 | 1977-08-11 | Anelva Corp | Sputiering apparatus |
| JPS536282A (en) * | 1976-07-07 | 1978-01-20 | Philips Nv | Spattering process and apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS584923Y2 (ja) | 1983-01-27 |