JPS5515260U - - Google Patents

Info

Publication number
JPS5515260U
JPS5515260U JP9792278U JP9792278U JPS5515260U JP S5515260 U JPS5515260 U JP S5515260U JP 9792278 U JP9792278 U JP 9792278U JP 9792278 U JP9792278 U JP 9792278U JP S5515260 U JPS5515260 U JP S5515260U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9792278U
Other languages
Japanese (ja)
Other versions
JPS5812828Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1978097922U priority Critical patent/JPS5812828Y2/ja
Publication of JPS5515260U publication Critical patent/JPS5515260U/ja
Application granted granted Critical
Publication of JPS5812828Y2 publication Critical patent/JPS5812828Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chain Conveyers (AREA)
  • Physical Vapour Deposition (AREA)
JP1978097922U 1978-07-15 1978-07-15 インライン式蒸着装置 Expired JPS5812828Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1978097922U JPS5812828Y2 (ja) 1978-07-15 1978-07-15 インライン式蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1978097922U JPS5812828Y2 (ja) 1978-07-15 1978-07-15 インライン式蒸着装置

Publications (2)

Publication Number Publication Date
JPS5515260U true JPS5515260U (enExample) 1980-01-31
JPS5812828Y2 JPS5812828Y2 (ja) 1983-03-11

Family

ID=29033211

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1978097922U Expired JPS5812828Y2 (ja) 1978-07-15 1978-07-15 インライン式蒸着装置

Country Status (1)

Country Link
JP (1) JPS5812828Y2 (enExample)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5125653U (enExample) * 1974-08-15 1976-02-25
JPS51143744U (enExample) * 1975-05-12 1976-11-18

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5125653U (enExample) * 1974-08-15 1976-02-25
JPS51143744U (enExample) * 1975-05-12 1976-11-18

Also Published As

Publication number Publication date
JPS5812828Y2 (ja) 1983-03-11

Similar Documents

Publication Publication Date Title
FR2416635B1 (enExample)
FR2417003B1 (enExample)
FR2416212B1 (enExample)
FR2416224B1 (enExample)
AU3898778A (enExample)
AU3803078A (enExample)
FR2416439B1 (enExample)
AU3892778A (enExample)
AU73950S (enExample)
JPS5515260U (enExample)
BG25872A1 (enExample)
BG25897A1 (enExample)
BG25814A2 (enExample)
BG25816A1 (enExample)
BG25818A1 (enExample)
BG25835A1 (enExample)
BG25836A1 (enExample)
BG25842A1 (enExample)
BG25843A1 (enExample)
BG25849A1 (enExample)
BG25854A1 (enExample)
BG25857A1 (enExample)
BG25858A1 (enExample)
BG25871A1 (enExample)
BE871570A (enExample)