JPS55152045U - - Google Patents

Info

Publication number
JPS55152045U
JPS55152045U JP5161979U JP5161979U JPS55152045U JP S55152045 U JPS55152045 U JP S55152045U JP 5161979 U JP5161979 U JP 5161979U JP 5161979 U JP5161979 U JP 5161979U JP S55152045 U JPS55152045 U JP S55152045U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5161979U
Other languages
Japanese (ja)
Other versions
JPS583297Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1979051619U priority Critical patent/JPS583297Y2/ja
Publication of JPS55152045U publication Critical patent/JPS55152045U/ja
Application granted granted Critical
Publication of JPS583297Y2 publication Critical patent/JPS583297Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
JP1979051619U 1979-04-18 1979-04-18 防塵形乾燥装置 Expired JPS583297Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1979051619U JPS583297Y2 (ja) 1979-04-18 1979-04-18 防塵形乾燥装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1979051619U JPS583297Y2 (ja) 1979-04-18 1979-04-18 防塵形乾燥装置

Publications (2)

Publication Number Publication Date
JPS55152045U true JPS55152045U (enrdf_load_html_response) 1980-11-01
JPS583297Y2 JPS583297Y2 (ja) 1983-01-20

Family

ID=28941302

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1979051619U Expired JPS583297Y2 (ja) 1979-04-18 1979-04-18 防塵形乾燥装置

Country Status (1)

Country Link
JP (1) JPS583297Y2 (enrdf_load_html_response)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50138076U (enrdf_load_html_response) * 1974-04-27 1975-11-13
JPS50138676U (enrdf_load_html_response) * 1974-04-30 1975-11-14
JPS5394766A (en) * 1977-01-31 1978-08-19 Toshiba Corp Rotation-system processor of semiconductor wafer

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50138076U (enrdf_load_html_response) * 1974-04-27 1975-11-13
JPS50138676U (enrdf_load_html_response) * 1974-04-30 1975-11-14
JPS5394766A (en) * 1977-01-31 1978-08-19 Toshiba Corp Rotation-system processor of semiconductor wafer

Also Published As

Publication number Publication date
JPS583297Y2 (ja) 1983-01-20

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