JPS55149947U - - Google Patents
Info
- Publication number
- JPS55149947U JPS55149947U JP4889079U JP4889079U JPS55149947U JP S55149947 U JPS55149947 U JP S55149947U JP 4889079 U JP4889079 U JP 4889079U JP 4889079 U JP4889079 U JP 4889079U JP S55149947 U JPS55149947 U JP S55149947U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1979048890U JPS5943730Y2 (ja) | 1979-04-14 | 1979-04-14 | ポジ型ホトレジスト現像装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1979048890U JPS5943730Y2 (ja) | 1979-04-14 | 1979-04-14 | ポジ型ホトレジスト現像装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55149947U true JPS55149947U (OSRAM) | 1980-10-29 |
| JPS5943730Y2 JPS5943730Y2 (ja) | 1984-12-26 |
Family
ID=28933455
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1979048890U Expired JPS5943730Y2 (ja) | 1979-04-14 | 1979-04-14 | ポジ型ホトレジスト現像装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5943730Y2 (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60156562U (ja) * | 1984-03-27 | 1985-10-18 | 日本合成化学工業株式会社 | フオトレジスト基板の処理装置 |
-
1979
- 1979-04-14 JP JP1979048890U patent/JPS5943730Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60156562U (ja) * | 1984-03-27 | 1985-10-18 | 日本合成化学工業株式会社 | フオトレジスト基板の処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5943730Y2 (ja) | 1984-12-26 |