JPS5514141B2 - - Google Patents
Info
- Publication number
- JPS5514141B2 JPS5514141B2 JP1400876A JP1400876A JPS5514141B2 JP S5514141 B2 JPS5514141 B2 JP S5514141B2 JP 1400876 A JP1400876 A JP 1400876A JP 1400876 A JP1400876 A JP 1400876A JP S5514141 B2 JPS5514141 B2 JP S5514141B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1400876A JPS5297337A (en) | 1976-02-13 | 1976-02-13 | Vaporrdepositing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1400876A JPS5297337A (en) | 1976-02-13 | 1976-02-13 | Vaporrdepositing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5297337A JPS5297337A (en) | 1977-08-16 |
| JPS5514141B2 true JPS5514141B2 (is") | 1980-04-14 |
Family
ID=11849170
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1400876A Granted JPS5297337A (en) | 1976-02-13 | 1976-02-13 | Vaporrdepositing device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5297337A (is") |
-
1976
- 1976-02-13 JP JP1400876A patent/JPS5297337A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5297337A (en) | 1977-08-16 |