JPS5514141B2 - - Google Patents

Info

Publication number
JPS5514141B2
JPS5514141B2 JP1400876A JP1400876A JPS5514141B2 JP S5514141 B2 JPS5514141 B2 JP S5514141B2 JP 1400876 A JP1400876 A JP 1400876A JP 1400876 A JP1400876 A JP 1400876A JP S5514141 B2 JPS5514141 B2 JP S5514141B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1400876A
Other languages
Japanese (ja)
Other versions
JPS5297337A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1400876A priority Critical patent/JPS5297337A/ja
Publication of JPS5297337A publication Critical patent/JPS5297337A/ja
Publication of JPS5514141B2 publication Critical patent/JPS5514141B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1400876A 1976-02-13 1976-02-13 Vaporrdepositing device Granted JPS5297337A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1400876A JPS5297337A (en) 1976-02-13 1976-02-13 Vaporrdepositing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1400876A JPS5297337A (en) 1976-02-13 1976-02-13 Vaporrdepositing device

Publications (2)

Publication Number Publication Date
JPS5297337A JPS5297337A (en) 1977-08-16
JPS5514141B2 true JPS5514141B2 (enrdf_load_html_response) 1980-04-14

Family

ID=11849170

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1400876A Granted JPS5297337A (en) 1976-02-13 1976-02-13 Vaporrdepositing device

Country Status (1)

Country Link
JP (1) JPS5297337A (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPS5297337A (en) 1977-08-16

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