JPS55137697A - Device for firing discharge lamp - Google Patents
Device for firing discharge lampInfo
- Publication number
- JPS55137697A JPS55137697A JP4527679A JP4527679A JPS55137697A JP S55137697 A JPS55137697 A JP S55137697A JP 4527679 A JP4527679 A JP 4527679A JP 4527679 A JP4527679 A JP 4527679A JP S55137697 A JPS55137697 A JP S55137697A
- Authority
- JP
- Japan
- Prior art keywords
- discharge lamp
- firing discharge
- firing
- lamp
- discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Circuit Arrangements For Discharge Lamps (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4527679A JPS55137697A (en) | 1979-04-16 | 1979-04-16 | Device for firing discharge lamp |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4527679A JPS55137697A (en) | 1979-04-16 | 1979-04-16 | Device for firing discharge lamp |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55137697A true JPS55137697A (en) | 1980-10-27 |
Family
ID=12714782
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4527679A Pending JPS55137697A (en) | 1979-04-16 | 1979-04-16 | Device for firing discharge lamp |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55137697A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61182223A (en) * | 1985-02-08 | 1986-08-14 | Ushio Inc | Ultrahigh pressure mercury lamp firing device for exposing semiconductor wafer material |
-
1979
- 1979-04-16 JP JP4527679A patent/JPS55137697A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61182223A (en) * | 1985-02-08 | 1986-08-14 | Ushio Inc | Ultrahigh pressure mercury lamp firing device for exposing semiconductor wafer material |
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