JPS5513576B2 - - Google Patents
Info
- Publication number
- JPS5513576B2 JPS5513576B2 JP5875076A JP5875076A JPS5513576B2 JP S5513576 B2 JPS5513576 B2 JP S5513576B2 JP 5875076 A JP5875076 A JP 5875076A JP 5875076 A JP5875076 A JP 5875076A JP S5513576 B2 JPS5513576 B2 JP S5513576B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Led Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5875076A JPS52142479A (en) | 1976-05-21 | 1976-05-21 | Method of making semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5875076A JPS52142479A (en) | 1976-05-21 | 1976-05-21 | Method of making semiconductor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52142479A JPS52142479A (en) | 1977-11-28 |
JPS5513576B2 true JPS5513576B2 (no) | 1980-04-10 |
Family
ID=13093207
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5875076A Granted JPS52142479A (en) | 1976-05-21 | 1976-05-21 | Method of making semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52142479A (no) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63170298A (ja) * | 1987-01-06 | 1988-07-14 | Fujikura Ltd | 液相エピタキシヤル成長装置 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4866368A (no) * | 1971-12-08 | 1973-09-11 | ||
JPS4950866A (no) * | 1972-09-18 | 1974-05-17 | ||
JPS49116960A (no) * | 1973-03-09 | 1974-11-08 | ||
JPS49121480A (no) * | 1973-03-20 | 1974-11-20 | ||
JPS50153866A (no) * | 1974-05-30 | 1975-12-11 |
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1976
- 1976-05-21 JP JP5875076A patent/JPS52142479A/ja active Granted
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4866368A (no) * | 1971-12-08 | 1973-09-11 | ||
JPS4950866A (no) * | 1972-09-18 | 1974-05-17 | ||
JPS49116960A (no) * | 1973-03-09 | 1974-11-08 | ||
JPS49121480A (no) * | 1973-03-20 | 1974-11-20 | ||
JPS50153866A (no) * | 1974-05-30 | 1975-12-11 |
Also Published As
Publication number | Publication date |
---|---|
JPS52142479A (en) | 1977-11-28 |