JPS5513576B2 - - Google Patents
Info
- Publication number
- JPS5513576B2 JPS5513576B2 JP5875076A JP5875076A JPS5513576B2 JP S5513576 B2 JPS5513576 B2 JP S5513576B2 JP 5875076 A JP5875076 A JP 5875076A JP 5875076 A JP5875076 A JP 5875076A JP S5513576 B2 JPS5513576 B2 JP S5513576B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Led Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5875076A JPS52142479A (en) | 1976-05-21 | 1976-05-21 | Method of making semiconductor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5875076A JPS52142479A (en) | 1976-05-21 | 1976-05-21 | Method of making semiconductor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52142479A JPS52142479A (en) | 1977-11-28 |
| JPS5513576B2 true JPS5513576B2 (cs) | 1980-04-10 |
Family
ID=13093207
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5875076A Granted JPS52142479A (en) | 1976-05-21 | 1976-05-21 | Method of making semiconductor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52142479A (cs) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63170298A (ja) * | 1987-01-06 | 1988-07-14 | Fujikura Ltd | 液相エピタキシヤル成長装置 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE788374A (fr) * | 1971-12-08 | 1973-01-02 | Rca Corp | Procede de depot d'une couche epitaxiale d'un materiau semi-conducteur sur la surface d'un substrat |
| JPS5314341B2 (cs) * | 1972-09-18 | 1978-05-17 | ||
| JPS5329428B2 (cs) * | 1973-03-09 | 1978-08-21 | ||
| JPS5329429B2 (cs) * | 1973-03-20 | 1978-08-21 | ||
| JPS50153866A (cs) * | 1974-05-30 | 1975-12-11 |
-
1976
- 1976-05-21 JP JP5875076A patent/JPS52142479A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52142479A (en) | 1977-11-28 |