JPS55134574U - - Google Patents

Info

Publication number
JPS55134574U
JPS55134574U JP3176480U JP3176480U JPS55134574U JP S55134574 U JPS55134574 U JP S55134574U JP 3176480 U JP3176480 U JP 3176480U JP 3176480 U JP3176480 U JP 3176480U JP S55134574 U JPS55134574 U JP S55134574U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3176480U
Other languages
Japanese (ja)
Other versions
JPS605163Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980031764U priority Critical patent/JPS605163Y2/en
Publication of JPS55134574U publication Critical patent/JPS55134574U/ja
Application granted granted Critical
Publication of JPS605163Y2 publication Critical patent/JPS605163Y2/en
Expired legal-status Critical Current

Links

Landscapes

  • Magnetically Actuated Valves (AREA)
JP1980031764U 1980-03-13 1980-03-13 Solenoid valve control circuit Expired JPS605163Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980031764U JPS605163Y2 (en) 1980-03-13 1980-03-13 Solenoid valve control circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980031764U JPS605163Y2 (en) 1980-03-13 1980-03-13 Solenoid valve control circuit

Publications (2)

Publication Number Publication Date
JPS55134574U true JPS55134574U (en) 1980-09-24
JPS605163Y2 JPS605163Y2 (en) 1985-02-16

Family

ID=28883960

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980031764U Expired JPS605163Y2 (en) 1980-03-13 1980-03-13 Solenoid valve control circuit

Country Status (1)

Country Link
JP (1) JPS605163Y2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014151434A (en) * 2013-02-05 2014-08-25 Electronics Inc Shot peening flow control part
WO2020003795A1 (en) * 2018-06-29 2020-01-02 株式会社Ｓｃｒｅｅｎホールディングス Opening/closing valve and substrate processing device provided with said opening/closing valve

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4715420U (en) * 1971-03-20 1972-10-23
JPS4968922A (en) * 1972-11-07 1974-07-04

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4715420U (en) * 1971-03-20 1972-10-23
JPS4968922A (en) * 1972-11-07 1974-07-04

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014151434A (en) * 2013-02-05 2014-08-25 Electronics Inc Shot peening flow control part
WO2020003795A1 (en) * 2018-06-29 2020-01-02 株式会社Ｓｃｒｅｅｎホールディングス Opening/closing valve and substrate processing device provided with said opening/closing valve

Also Published As

Publication number Publication date
JPS605163Y2 (en) 1985-02-16

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