JPS5513422Y2 - - Google Patents

Info

Publication number
JPS5513422Y2
JPS5513422Y2 JP14158474U JP14158474U JPS5513422Y2 JP S5513422 Y2 JPS5513422 Y2 JP S5513422Y2 JP 14158474 U JP14158474 U JP 14158474U JP 14158474 U JP14158474 U JP 14158474U JP S5513422 Y2 JPS5513422 Y2 JP S5513422Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14158474U
Other languages
Japanese (ja)
Other versions
JPS5167675U (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14158474U priority Critical patent/JPS5513422Y2/ja
Publication of JPS5167675U publication Critical patent/JPS5167675U/ja
Application granted granted Critical
Publication of JPS5513422Y2 publication Critical patent/JPS5513422Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Electroplating Methods And Accessories (AREA)
JP14158474U 1974-11-22 1974-11-22 Expired JPS5513422Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14158474U JPS5513422Y2 (en) 1974-11-22 1974-11-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14158474U JPS5513422Y2 (en) 1974-11-22 1974-11-22

Publications (2)

Publication Number Publication Date
JPS5167675U JPS5167675U (en) 1976-05-28
JPS5513422Y2 true JPS5513422Y2 (en) 1980-03-26

Family

ID=28421271

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14158474U Expired JPS5513422Y2 (en) 1974-11-22 1974-11-22

Country Status (1)

Country Link
JP (1) JPS5513422Y2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018172729A (en) * 2017-03-31 2018-11-08 株式会社ファルテック Plating apparatus
EP3830320A1 (en) * 2018-07-30 2021-06-09 RENA Technologies GmbH Flow generator, deposition device and method for the deposition of a material

Also Published As

Publication number Publication date
JPS5167675U (en) 1976-05-28

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