JPS5513411U - - Google Patents
Info
- Publication number
- JPS5513411U JPS5513411U JP9506278U JP9506278U JPS5513411U JP S5513411 U JPS5513411 U JP S5513411U JP 9506278 U JP9506278 U JP 9506278U JP 9506278 U JP9506278 U JP 9506278U JP S5513411 U JPS5513411 U JP S5513411U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Small-Scale Networks (AREA)
- Selective Calling Equipment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9506278U JPS5513411U (en) | 1978-07-12 | 1978-07-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9506278U JPS5513411U (en) | 1978-07-12 | 1978-07-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5513411U true JPS5513411U (en) | 1980-01-28 |
Family
ID=29027654
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9506278U Pending JPS5513411U (en) | 1978-07-12 | 1978-07-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5513411U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6210271A (en) * | 1985-07-05 | 1987-01-19 | ウエスチングハウス エレクトリック コ−ポレ−ション | Target structure of sputtering coating apparatus |
| JPS63467A (en) * | 1986-06-18 | 1988-01-05 | Fujitsu Ltd | Sputtering target |
-
1978
- 1978-07-12 JP JP9506278U patent/JPS5513411U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6210271A (en) * | 1985-07-05 | 1987-01-19 | ウエスチングハウス エレクトリック コ−ポレ−ション | Target structure of sputtering coating apparatus |
| JPS63467A (en) * | 1986-06-18 | 1988-01-05 | Fujitsu Ltd | Sputtering target |