JPS55131091U - - Google Patents

Info

Publication number
JPS55131091U
JPS55131091U JP3214779U JP3214779U JPS55131091U JP S55131091 U JPS55131091 U JP S55131091U JP 3214779 U JP3214779 U JP 3214779U JP 3214779 U JP3214779 U JP 3214779U JP S55131091 U JPS55131091 U JP S55131091U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3214779U
Other languages
Japanese (ja)
Other versions
JPS629673Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3214779U priority Critical patent/JPS629673Y2/ja
Publication of JPS55131091U publication Critical patent/JPS55131091U/ja
Application granted granted Critical
Publication of JPS629673Y2 publication Critical patent/JPS629673Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Resistance Heating (AREA)
JP3214779U 1979-03-12 1979-03-12 Expired JPS629673Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3214779U JPS629673Y2 (enrdf_load_stackoverflow) 1979-03-12 1979-03-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3214779U JPS629673Y2 (enrdf_load_stackoverflow) 1979-03-12 1979-03-12

Publications (2)

Publication Number Publication Date
JPS55131091U true JPS55131091U (enrdf_load_stackoverflow) 1980-09-17
JPS629673Y2 JPS629673Y2 (enrdf_load_stackoverflow) 1987-03-06

Family

ID=28885106

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3214779U Expired JPS629673Y2 (enrdf_load_stackoverflow) 1979-03-12 1979-03-12

Country Status (1)

Country Link
JP (1) JPS629673Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005179099A (ja) * 2003-12-17 2005-07-07 Komatsu Electronic Metals Co Ltd 単結晶半導体製造用ヒータ装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005179099A (ja) * 2003-12-17 2005-07-07 Komatsu Electronic Metals Co Ltd 単結晶半導体製造用ヒータ装置

Also Published As

Publication number Publication date
JPS629673Y2 (enrdf_load_stackoverflow) 1987-03-06

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