JPS5512715A - Container for high purity ic wafer - Google Patents
Container for high purity ic waferInfo
- Publication number
- JPS5512715A JPS5512715A JP8457878A JP8457878A JPS5512715A JP S5512715 A JPS5512715 A JP S5512715A JP 8457878 A JP8457878 A JP 8457878A JP 8457878 A JP8457878 A JP 8457878A JP S5512715 A JPS5512715 A JP S5512715A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- ribs
- guide pins
- periphery
- parallel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Packaging For Recording Disks (AREA)
- Weting (AREA)
Abstract
PURPOSE: To increase resistance to impact as well as to reduce weight by providing a pantagraph type pussing body that is capable of assembling and disassembling and is parallel to upright rims which are parallel and equally spaced on the upper center of the inner surface of a lid.
CONSTITUTION: When a wafer 5 is inserted between two guide pins 2, the lower side of the periphery of the wafer 5 comes into contact with ribs 3 and 4 and is supported by them. Thus the part of the wafer near the guide pins 2 is located in the air and is only separated by each wafer guide pin 2. When the straight section of wafer 5 is located to the guide pins 2 and then the wafer is brought into contact with the wafer supporting ribs 3 and 4 and is placed on them, the ribs 3 and 4 are pressed outward by the periphery of the wafer. Therefore, the wafer 5 is elastically supported by the ribs 3 and 4, thus absorbing impact from the bottom of the box. As a result, breakage of the wafer 5 is prevented.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8457878A JPS5512715A (en) | 1978-07-13 | 1978-07-13 | Container for high purity ic wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8457878A JPS5512715A (en) | 1978-07-13 | 1978-07-13 | Container for high purity ic wafer |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5512715A true JPS5512715A (en) | 1980-01-29 |
JPS5712525B2 JPS5712525B2 (en) | 1982-03-11 |
Family
ID=13834548
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8457878A Granted JPS5512715A (en) | 1978-07-13 | 1978-07-13 | Container for high purity ic wafer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5512715A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59185826U (en) * | 1983-05-11 | 1984-12-10 | クリ−ンサアフエイス技術株式会社 | Case for photomask board |
JPH06208880A (en) * | 1993-02-16 | 1994-07-26 | Takeaki Kashiwabara | Quick-burning device of spark plug for internal combustion engine |
WO1994025980A1 (en) * | 1993-04-27 | 1994-11-10 | Kyushu Komatsu Electronics Co., Ltd. | Container for packing semiconductor wafer |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5285477A (en) * | 1976-01-09 | 1977-07-15 | Senken Kk | Wafer carrying container for integrated circuit |
-
1978
- 1978-07-13 JP JP8457878A patent/JPS5512715A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5285477A (en) * | 1976-01-09 | 1977-07-15 | Senken Kk | Wafer carrying container for integrated circuit |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59185826U (en) * | 1983-05-11 | 1984-12-10 | クリ−ンサアフエイス技術株式会社 | Case for photomask board |
JPH06208880A (en) * | 1993-02-16 | 1994-07-26 | Takeaki Kashiwabara | Quick-burning device of spark plug for internal combustion engine |
WO1994025980A1 (en) * | 1993-04-27 | 1994-11-10 | Kyushu Komatsu Electronics Co., Ltd. | Container for packing semiconductor wafer |
Also Published As
Publication number | Publication date |
---|---|
JPS5712525B2 (en) | 1982-03-11 |
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