JPS55126649U - - Google Patents
Info
- Publication number
- JPS55126649U JPS55126649U JP1979026619U JP2661979U JPS55126649U JP S55126649 U JPS55126649 U JP S55126649U JP 1979026619 U JP1979026619 U JP 1979026619U JP 2661979 U JP2661979 U JP 2661979U JP S55126649 U JPS55126649 U JP S55126649U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00261—Processes for packaging MEMS devices
- B81C1/00269—Bonding of solid lids or wafers to the substrate
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1979026619U JPS55126649U (enExample) | 1979-03-01 | 1979-03-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1979026619U JPS55126649U (enExample) | 1979-03-01 | 1979-03-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS55126649U true JPS55126649U (enExample) | 1980-09-08 |
Family
ID=28869217
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1979026619U Pending JPS55126649U (enExample) | 1979-03-01 | 1979-03-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55126649U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0465451U (enExample) * | 1990-10-18 | 1992-06-08 |
-
1979
- 1979-03-01 JP JP1979026619U patent/JPS55126649U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0465451U (enExample) * | 1990-10-18 | 1992-06-08 |