JPS55122352U - - Google Patents
Info
- Publication number
- JPS55122352U JPS55122352U JP2024379U JP2024379U JPS55122352U JP S55122352 U JPS55122352 U JP S55122352U JP 2024379 U JP2024379 U JP 2024379U JP 2024379 U JP2024379 U JP 2024379U JP S55122352 U JPS55122352 U JP S55122352U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2024379U JPS55122352U (enExample) | 1979-02-21 | 1979-02-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2024379U JPS55122352U (enExample) | 1979-02-21 | 1979-02-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS55122352U true JPS55122352U (enExample) | 1980-08-30 |
Family
ID=28850845
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024379U Pending JPS55122352U (enExample) | 1979-02-21 | 1979-02-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55122352U (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59188135A (ja) * | 1983-04-08 | 1984-10-25 | Fujitsu Ltd | 半導体基板の吸着方法 |
| JPH07273176A (ja) * | 1995-03-10 | 1995-10-20 | Hitachi Ltd | 真空処理装置の試料保持方法 |
-
1979
- 1979-02-21 JP JP2024379U patent/JPS55122352U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59188135A (ja) * | 1983-04-08 | 1984-10-25 | Fujitsu Ltd | 半導体基板の吸着方法 |
| JPH07273176A (ja) * | 1995-03-10 | 1995-10-20 | Hitachi Ltd | 真空処理装置の試料保持方法 |