JPS55122352U - - Google Patents

Info

Publication number
JPS55122352U
JPS55122352U JP2024379U JP2024379U JPS55122352U JP S55122352 U JPS55122352 U JP S55122352U JP 2024379 U JP2024379 U JP 2024379U JP 2024379 U JP2024379 U JP 2024379U JP S55122352 U JPS55122352 U JP S55122352U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024379U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2024379U priority Critical patent/JPS55122352U/ja
Publication of JPS55122352U publication Critical patent/JPS55122352U/ja
Pending legal-status Critical Current

Links

JP2024379U 1979-02-21 1979-02-21 Pending JPS55122352U (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2024379U JPS55122352U (cg-RX-API-DMAC7.html) 1979-02-21 1979-02-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2024379U JPS55122352U (cg-RX-API-DMAC7.html) 1979-02-21 1979-02-21

Publications (1)

Publication Number Publication Date
JPS55122352U true JPS55122352U (cg-RX-API-DMAC7.html) 1980-08-30

Family

ID=28850845

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024379U Pending JPS55122352U (cg-RX-API-DMAC7.html) 1979-02-21 1979-02-21

Country Status (1)

Country Link
JP (1) JPS55122352U (cg-RX-API-DMAC7.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59188135A (ja) * 1983-04-08 1984-10-25 Fujitsu Ltd 半導体基板の吸着方法
JPH07273176A (ja) * 1995-03-10 1995-10-20 Hitachi Ltd 真空処理装置の試料保持方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59188135A (ja) * 1983-04-08 1984-10-25 Fujitsu Ltd 半導体基板の吸着方法
JPH07273176A (ja) * 1995-03-10 1995-10-20 Hitachi Ltd 真空処理装置の試料保持方法

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