JPS55122135U - - Google Patents
Info
- Publication number
- JPS55122135U JPS55122135U JP2037379U JP2037379U JPS55122135U JP S55122135 U JPS55122135 U JP S55122135U JP 2037379 U JP2037379 U JP 2037379U JP 2037379 U JP2037379 U JP 2037379U JP S55122135 U JPS55122135 U JP S55122135U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2037379U JPS55122135U (enExample) | 1979-02-21 | 1979-02-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2037379U JPS55122135U (enExample) | 1979-02-21 | 1979-02-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS55122135U true JPS55122135U (enExample) | 1980-08-30 |
Family
ID=28851227
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2037379U Pending JPS55122135U (enExample) | 1979-02-21 | 1979-02-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55122135U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2023541220A (ja) * | 2020-09-17 | 2023-09-29 | アプライド マテリアルズ インコーポレイテッド | 流量制御装置において使用するための微小電気機械デバイス |
-
1979
- 1979-02-21 JP JP2037379U patent/JPS55122135U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2023541220A (ja) * | 2020-09-17 | 2023-09-29 | アプライド マテリアルズ インコーポレイテッド | 流量制御装置において使用するための微小電気機械デバイス |
| US12235144B2 (en) | 2020-09-17 | 2025-02-25 | Applied Materials, Inc.—Robotics | Micro-electromechanical device for use in a flow control apparatus |