JPS5511667Y2 - - Google Patents

Info

Publication number
JPS5511667Y2
JPS5511667Y2 JP1975122111U JP12211175U JPS5511667Y2 JP S5511667 Y2 JPS5511667 Y2 JP S5511667Y2 JP 1975122111 U JP1975122111 U JP 1975122111U JP 12211175 U JP12211175 U JP 12211175U JP S5511667 Y2 JPS5511667 Y2 JP S5511667Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1975122111U
Other languages
Japanese (ja)
Other versions
JPS5236181U (cg-RX-API-DMAC10.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1975122111U priority Critical patent/JPS5511667Y2/ja
Publication of JPS5236181U publication Critical patent/JPS5236181U/ja
Application granted granted Critical
Publication of JPS5511667Y2 publication Critical patent/JPS5511667Y2/ja
Expired legal-status Critical Current

Links

JP1975122111U 1975-09-03 1975-09-03 Expired JPS5511667Y2 (cg-RX-API-DMAC10.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1975122111U JPS5511667Y2 (cg-RX-API-DMAC10.html) 1975-09-03 1975-09-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1975122111U JPS5511667Y2 (cg-RX-API-DMAC10.html) 1975-09-03 1975-09-03

Publications (2)

Publication Number Publication Date
JPS5236181U JPS5236181U (cg-RX-API-DMAC10.html) 1977-03-14
JPS5511667Y2 true JPS5511667Y2 (cg-RX-API-DMAC10.html) 1980-03-13

Family

ID=28602745

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1975122111U Expired JPS5511667Y2 (cg-RX-API-DMAC10.html) 1975-09-03 1975-09-03

Country Status (1)

Country Link
JP (1) JPS5511667Y2 (cg-RX-API-DMAC10.html)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS502885U (cg-RX-API-DMAC10.html) * 1973-05-18 1975-01-13
JP2566065Y2 (ja) * 1992-06-15 1998-03-25 国際電気株式会社 ウェーハ保持具

Also Published As

Publication number Publication date
JPS5236181U (cg-RX-API-DMAC10.html) 1977-03-14

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