JPS55110039A - Method of manufacturing contact of semiconductor device - Google Patents
Method of manufacturing contact of semiconductor deviceInfo
- Publication number
- JPS55110039A JPS55110039A JP1255780A JP1255780A JPS55110039A JP S55110039 A JPS55110039 A JP S55110039A JP 1255780 A JP1255780 A JP 1255780A JP 1255780 A JP1255780 A JP 1255780A JP S55110039 A JPS55110039 A JP S55110039A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- manufacturing contact
- manufacturing
- contact
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Electrodes Of Semiconductors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB7905111A GB2042801B (en) | 1979-02-13 | 1979-02-13 | Contacting semicnductor devices |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS55110039A true JPS55110039A (en) | 1980-08-25 |
Family
ID=10503176
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1255780A Pending JPS55110039A (en) | 1979-02-13 | 1980-02-06 | Method of manufacturing contact of semiconductor device |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JPS55110039A (en) |
| DE (1) | DE3004480A1 (en) |
| FR (1) | FR2449332A1 (en) |
| GB (1) | GB2042801B (en) |
| IT (1) | IT1209190B (en) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL153374B (en) * | 1966-10-05 | 1977-05-16 | Philips Nv | PROCESS FOR THE MANUFACTURE OF A SEMICONDUCTOR DEVICE PROVIDED WITH AN OXIDE LAYER AND SEMI-CONDUCTOR DEVICE MANUFACTURED ACCORDING TO THE PROCEDURE. |
| NL6815286A (en) * | 1967-10-28 | 1969-05-01 | ||
| US3761327A (en) * | 1971-03-19 | 1973-09-25 | Itt | Planar silicon gate mos process |
| JPS5246784A (en) * | 1975-10-11 | 1977-04-13 | Hitachi Ltd | Process for production of semiconductor device |
| DE2610208C3 (en) * | 1976-03-11 | 1979-06-13 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Process for the production of semiconductor components |
-
1979
- 1979-02-13 GB GB7905111A patent/GB2042801B/en not_active Expired
-
1980
- 1980-02-06 JP JP1255780A patent/JPS55110039A/en active Pending
- 1980-02-07 DE DE19803004480 patent/DE3004480A1/en not_active Withdrawn
- 1980-02-13 FR FR8003136A patent/FR2449332A1/en active Granted
- 1980-02-13 IT IT8019876A patent/IT1209190B/en active
Also Published As
| Publication number | Publication date |
|---|---|
| GB2042801B (en) | 1983-12-14 |
| FR2449332B1 (en) | 1983-10-28 |
| FR2449332A1 (en) | 1980-09-12 |
| IT8019876A0 (en) | 1980-02-13 |
| IT1209190B (en) | 1989-07-16 |
| GB2042801A (en) | 1980-09-24 |
| DE3004480A1 (en) | 1980-08-21 |
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