JPS55100980A - Sputtering device - Google Patents

Sputtering device

Info

Publication number
JPS55100980A
JPS55100980A JP562679A JP562679A JPS55100980A JP S55100980 A JPS55100980 A JP S55100980A JP 562679 A JP562679 A JP 562679A JP 562679 A JP562679 A JP 562679A JP S55100980 A JPS55100980 A JP S55100980A
Authority
JP
Japan
Prior art keywords
sputtering device
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP562679A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6151029B2 (enrdf_load_stackoverflow
Inventor
Rudorufu Kueenru Manfuretsudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coulter Systems Corp
Original Assignee
Coulter Systems Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Coulter Systems Corp filed Critical Coulter Systems Corp
Priority to JP562679A priority Critical patent/JPS55100980A/ja
Publication of JPS55100980A publication Critical patent/JPS55100980A/ja
Publication of JPS6151029B2 publication Critical patent/JPS6151029B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Photoreceptors In Electrophotography (AREA)
JP562679A 1979-01-23 1979-01-23 Sputtering device Granted JPS55100980A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP562679A JPS55100980A (en) 1979-01-23 1979-01-23 Sputtering device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP562679A JPS55100980A (en) 1979-01-23 1979-01-23 Sputtering device

Publications (2)

Publication Number Publication Date
JPS55100980A true JPS55100980A (en) 1980-08-01
JPS6151029B2 JPS6151029B2 (enrdf_load_stackoverflow) 1986-11-07

Family

ID=11616359

Family Applications (1)

Application Number Title Priority Date Filing Date
JP562679A Granted JPS55100980A (en) 1979-01-23 1979-01-23 Sputtering device

Country Status (1)

Country Link
JP (1) JPS55100980A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59179781A (ja) * 1983-03-31 1984-10-12 Kawasaki Heavy Ind Ltd スパツタリング装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49101273A (enrdf_load_stackoverflow) * 1973-01-12 1974-09-25

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49101273A (enrdf_load_stackoverflow) * 1973-01-12 1974-09-25

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59179781A (ja) * 1983-03-31 1984-10-12 Kawasaki Heavy Ind Ltd スパツタリング装置

Also Published As

Publication number Publication date
JPS6151029B2 (enrdf_load_stackoverflow) 1986-11-07

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